On line Gas Analyzer-k2002
|
PDF
|
| Print |
|
E-mail
|
|
On line Gas Analyzer - k2002 Nitrogen in Argon or Helium 
- Display resolution to 10 ppt
- Plasma emission system
- No sensor or detector to replace,maintenance free
|
- Microprocessor controlled
- Low sample flow
- Fast response
|
- Electronic wafer fabs
- Gas management system
- Gas purifier efficiency monitoring
|
- Specialty gas laboratories
- High purity Argon plant
|
| |
High (mm) |
Deep (mm) |
Wide (mm) |
| Standard rack mount 3U |
5.25" (133.3) |
18" (457.0) |
19" (482.6) |
| Detector type |
Single beam. Electromagnetically induced plasma cell. Non ratiometric measurement, Material : Quartz, single element, vacuum tight to 10 PSIG (69 KPAG) |
| Range |
- X1 : 0 - 100 ppb display resolution to 10 ppt
- X10 : 0 - 500 ppb display resolution to .1 ppb
- X100 : 0 -5 ppm display resolution to 0.01 ppm
|
| Accuracy |
- ± 1.5% (or better) of reading on 0 -100 / 0 - 500 ppb
- ± 1% on 5 ppm range
|
| Sensitivity |
Guarantee 1 ppb |
| Sample flow requirements |
25 sccm |
| Recommended calibration gas |
- Zero : from purifier
- Span : 1 to 3 ppm or dilution system (orifice based)
|
| Flow accuracy |
0 to 200 cc ± 1 % full scale |
| Minimum input pressure |
8 PSIG, for 25 cc/min (55 KPAG) |
| Recommended operating pressure |
10 PSIG to 20 PSIG for 25 cc/min (70 KPAG to 140 KPAG) |
| Operating temperature |
10° C to 35° C (software temperature compensation). Detector system is temperature regulated in an insulated compartment (thermo-cool system) |
| Sample vent and by-pass vent |
1/8" Swagelok |
| Simple inlet |
1/8" VCR |
| Supply |
115 VAC, 50 - 60 Hz or 220 VAC, 50 - 60 Hz (on order) |
| Power consumption |
Maximum 35 watts |
| 4 - 20 mA |
- 4 - 20 mA isolated output
- Maximum load impedance : 600 ohm at 20 mA DC
- Insulation : 750 VDC or AC peak maximum
|
| Response time |
Less than 90 seconds for 63% step change at 25 cc (tipically 60 seconds) |
| Weight |
15 kg (33 lbs) |
| Standard features |
- Fully microprocessor-controlled, with 4 X 40 LCD display
- Self-diagnostic system software
- Digital output : 4 digitals outputs. 3 are for range indication and 1 for system status monitoring
- Two alarms contact output
- Isolated 4 - 20 mA output
|
| Options |
- Serial port : RS-232
- Custom options : contact factory
|
|
RSS Feed